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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 55(6); 2022
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2022;55(6):363-367. Published online: Dec, 29, 2022
DOI : 10.5695/JSSE.2022.55.6.363
마그네트론 스퍼터링법으로 제조된 ZTZ 박막의 구조적 전기광학적 특성에 미치는 전자빔 조사의 영향
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a한국생산기술연구원 울산본부 첨단정형공정그룹, b울산대학교 첨단소재공학부
초록
Transparent ZnO/Ti/ZnO (ZTZ) tri-layered films were prepared with radio frequency (RF) and direct current (DC) magnetron sputtering on the glass substrate. The thickness of the ZnO and Ti films was kept at 50 and 10 nm to consider the effect of the electr
키워드 ZnO, Ti, XRD, AFM, Figure of merit.