The Korean Society of Surface Science and Engineering

We fabricated In₂O₃ zig-zag nanocolumns(ZZNCs) by oblique angle deposition method based on e-beam evaporator for highly sensitive and selective CH₃COCH₃ sensor. Our results indicate that as the ZZNCs layer stacks, the gas response also increases. In comparison to thin films, ZZNCs at 5 layer show a 117-fold enhancement in gas response and a rapid response time (~2 s). When measured with various gases, it showed a high selectivity towards acetone. Under conditions of R.H. 80%, exposure to CH₃COCH₃ gas theoretically indicated a detection limit of 1.2 part-per-billion(ppb). These results suggest the potential of In₂O₃ ZZNCs as a breath analyzer for the diagnosis of diabetes.

키워드