Aug, 31, 2024

Vol.57 No.4

학회 연락처

상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 18(1); 1985
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 1985;18(1):5-11. Published online: Nov, 30, -0001

PDF

$TiI_4$에 의한 Stainless 강의 Ti증착속도에 관한 연구

  • 유재근;한준수;백영현;
    고려대학교 금속공학과;고려대학교 금속공학과;고려대학교 금속공학과;
초록

Titanium was deposited onto AISI-430 stainless steel by chemical vapor deposition from $TiI_4;and;H_2$ gas mixture. Effects of temperature, flow rate of the gas, and $TiI_4$ partial pressure on the deposition rate were thoroughly inv

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