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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 19(2); 1986
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 1986;19(2):51-58. Published online: Nov, 30, -0001
眞空 蒸着에 관한 速度論的 모델
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韓國動力資源硏究所 特殊金屬硏究室;
초록
A theoretical model was proposed to predict the rate of particles impinging on the negatively biased substrate and the total kinetic energy per unit time. The model takes into an account of kinetic theory based on Maxwell statistics and elementary plasma
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