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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 23(2); 1990
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 1990;23(2):1-10. Published online: Nov, 30, -0001
MOVPE 단결정층 성장법 II. MOVPE공정 및 특징
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성균관대학교 재료공학과;
초록
Metal-Organic Vapor Phase Epitaxy (MOVPE) is an epitaxial process utilizaing ane or more of organometallice as reactnte to grow compound semicond semiconductror layers. MOVPE is basically a cold wall process in which reactants are delivered without reacti
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