Aug, 31, 2024

Vol.57 No.4

최신논문 논문목록
논문검색
논문 상세 검색
학회 연락처

상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 23(2); 1990
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 1990;23(2):18-23. Published online: Nov, 30, -0001

PDF

SnCl$_4$가수분해 반응의 화학증착법에 의한 SnO$_2$박막의 제조 및 가스센서 특징(I) Preparation of SnO2 Thin Films by chemical Vapor Deposition Using Hydrolysis of SnCl4 and gas-sensing characteristics of the Film

  • 김용일;김광호;박희찬;
    부산대학교 무기재료공학과;부산대학교 무기재료공학과;부산대학교 무기재료공학과;
초록

Thin films of tin oxide were prepared by chemical vapor deposition (C.V>D) using the hydrolysis reaction of SnCl4, Deposition rate increased with the increase of temperature up to $500^{circ}C$and then decreased at $700^{circ}C$, D

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