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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 24(1); 1991
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 1991;24(1):1-17. Published online: Nov, 30, -0001
MOVPE 단결정층 성장법 IV. MOVPE 및 ALE 반응경로
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성균관대학교 재료공학과;
초록
Understanding of the detailed reaction mechanisms during MOVPE and ALE is essential to further improve the properties of the grown crystals and the controllability of the growth parameters. The unified models for the detailed reaction paths are not availa
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