Aug, 31, 2024

Vol.57 No.4

최신논문 논문목록
논문검색
논문 상세 검색
학회 연락처

상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 24(4); 1991
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 1991;24(4):215-221. Published online: Nov, 30, -0001

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ECR 플라즈마에 의한 알루미늄 질화처리시 표면조도의 영향

  • 김진수;안재현;고경현;오수기;
    아주대학교 재료공학과;아주대학교 재료공학과;아주대학교 재료공학과;아주대학교 물리학과;
초록

Microstructure evolution during low temperature vapor deposition exhibits wel-developed columnar structure mainly owing to geometrical shadowing effect of surface roughness. It is concluded that this structure is concided with many theoretical models sugg

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