Aug, 31, 2024

Vol.57 No.4

최신논문 논문목록
논문검색
논문 상세 검색
학회 연락처

상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 25(2); 1992
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 1992;25(2):90-96. Published online: Nov, 30, -0001

PDF

폴리이미드 위에 스퍼터 증착된 구리 박막의 미세구조

  • 정태경;김영호;유진;
    한국과학기술원 전자재료공학과;한양대학교 재료공학과;한국과학기술원 전자재료공학과;
초록

Thed effects of sputter gas pressure and substrate surface micro-roughness on the microstructure and surface topography have been investigated in the Cu thin films sputter deposited onto polyimide substrates. The surface roughness of polyimide was control

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