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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 25(5); 1992
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 1992;25(5):235-252. Published online: Nov, 30, -0001
D.C. Magnetron Sputter를 이용한 (Ti, Al)N 피막의 고온산화특성
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부산대학교 공과대학원 금속공학과;부산대학교 공과대학원 금속공학과;
초록
(Ti, Al)N films were deposited on 304 stainless steel sheet by D.C. magnetron sputtering using Al target and Ti plate. The high temperature oxidation of (T, Al)N films with the variation of composition has been investigated. The chemical composition of (T
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