Aug, 31, 2024

Vol.57 No.4

최신논문 논문목록
논문검색
논문 상세 검색
학회 연락처

상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 27(6); 1994
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 1994;27(6):327-334. Published online: Nov, 30, -0001

PDF

Helicon wave 에 의하여 여기된 Ar 플라즈마 특성

  • 김태영;정기형;이승학;정재국;
    서울대학교 원자핵공학과;서울대학교 원자핵공학과;중앙대학교 물리학과;중앙대학교 물리학과;
초록

This work concerns a research for helicon wave plasma generators with applications to materials pro-cessing. For this end, helicon wave plasma source has been designed, constructed and tested. High density plasma was successfully produced and diagnosed

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