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KISE Journal of Korean Institute of Surface Engineering 1995;28(5):267-275. Published online: Nov, 30, -0001
Electron beam can provide convenient way to heat the substrate during Hollow Cathode Discharge (HCD) ion plating of Ti(C, N)films. Densification of columnar structrue is enhanced by longer duration of electron beam heating(EBH). While strong(111) texture
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