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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 29(4); 1996
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 1996;29(4):261-267. Published online: Nov, 30, -0001
D. C. 마그네트론 스퍼터링에 의한 증착조건이 TiN다층박막의 밀착력에 미치는 영향
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울산대학교 공과대학 금속공학과;대우전자제2연구소;한국기계연구원 박막연구실;한국기계연구원 박막연구실;
초록
The characteristics and adhesion strength of TiN layer deposited by D. C. magnetron sputtering were investigated. Three types of TiN layers were deposited on STS304 stainless steel. Scratch tests were performed to determine the effect of deposition temper
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