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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 29(5); 1996
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 1996;29(5):314-324. Published online: Nov, 30, -0001
SCANNING PROBE NANOPROCESSING
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Tsukuba Research Laboratory, Nikon Corporation;Tsukuba Research Laboratory, Nikon Corporation;
초록
Scanning probe microscopes (SPMs) such as the scanning tunneling microscope (STM) and the atomic force microscope (AFM) were used for surface modification tools at the nanometer scale. Material surfaces, i. e., titanium, hydrogen-terminated silicon and
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