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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 29(5); 1996
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 1996;29(5):498-504. Published online: Nov, 30, -0001
SPUTTER-DEPOSITION OF CARBON NITRIDE FILMS WITH HIGH NITROGEN CONCENTRATION
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Department of Materials Processing Engineering, Nagoya University;;
초록
The synthesis of carbon nitride thin films with high nitrgen concentration was accomplished by reactive supttering at relatively high working pressure. In conventional reactive sputter-deposition of carbon nitride films, working pressure was 0.3-5Pa and
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