Aug, 31, 2024

Vol.57 No.4

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상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 29(5); 1996
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 1996;29(5):532-539. Published online: Nov, 30, -0001

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SPECTRO-ELLIPSOMETRIC STUDIES OF STRUCTURE AND OPTICAL PROPERTIES OF PLSMA-GROWN DLC FILMS

  • Rhee, Sung-Gyu;Lee, Soon-Il;Oh, Soo-Ghee;Lee, Kwang-Ryeol;
    Department of physics Ajou University;Department of physics Ajou University;Department of physics Ajou University;Division of Ceramics, Korea Institute of Science and Technnology;
초록

Diamond-like carbon (DLC) films were deposited on silicon substrates by the plasma decomposition of hydrocarbons under various conditions, and studied by the spectroscopic ellipsometry (SE). We used the effective medium approximation with the dispersion

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