Aug, 31, 2024

Vol.57 No.4

최신논문 논문목록
논문검색
논문 상세 검색
학회 연락처

상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 29(5); 1996
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 1996;29(5):556-562. Published online: Nov, 30, -0001

PDF

OPTICAL PROPERTIES OF AMORPHOUS CN FILMS

  • Park, Sung-Jin;Lee, Soon-Il;Oh, Soo-Ghee;Bae, J.H.;Kim, W.M.;Cheong, B.;Kim, S.G.;
    Department of Physics, Ajou University;Department of Physics, Ajou University;Department of Physics, Ajou University;Division of Metals, Korea Institute of Science and Technology;Division of Metals, Korea Institute of Science and Technology;Division of Me
초록

Carbon nitride (CN) films were synthesized on silicon substrates by a combined ion-beam and laser-ablation method under various conditions; ion-beam energy and ion-beam current were varied. Raman spectroscopy and spectroscopic ellipsometry (SE) were emplo

키워드