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- KISE Journal of Korean Institute of Surface Engineering
- Volume 29(5); 1996
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 1996;29(5):585-592. Published online: Nov, 30, -0001
EFFECTS OF GAS PRESSURES ON GRANULAR STRUCTURE`S FOR MATION OF ALUMINUM FILMS PREPARED BY PVD PROCESS
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Korea Maritime University;
초록
In order to investigate the influence of gas pressure in PVD deposition conditions, aluminum films were prepared by vacuum evaporation and ion plating. The crystal orientation and morphology of the films affected by argon gas pressures were characterized
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