PREFERRED ORIENTATION AND MICROSTRUCTURE OF MOD DERIVED SrBi$_{2x}$Ta$_2$O$_9$ THIN FILMS WITH Bi CONTENT x
Yeon, Dae-Joong;Park, Joo-Dong;Oh, Tae-Sung;
Department of Metallurgy and Materials Science, Hong Ik University;Department of Metallurgy and Materials Science, Hong Ik University;Department of Metallurgy and Materials Science, Hong Ik University;
초록
$SrBi_{2x}TaO_9$ ferroelectric thin films were prepared on platinized silicon substrates using MOD proces, and crystallization behavior of the films was investigated with variation of the annealing temperature and Bi content x. Crystalline phas