Aug, 31, 2024

Vol.57 No.4

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상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 29(6); 1996
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 1996;29(6):654-659. Published online: Nov, 30, -0001

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SIMULTANEOUS DETERMINATION OF OPTICAL CONSTANTS AND DEPTH-PROFILE OF SPUTTERED AMORPHOUS TiO$_2$ THIN FILMS

  • Rhee, Sung-Gyu;Lee, Soon-Il;Oh, Soo-Ghee;
    Department of Physics, Ajou University;Department of Physics, Ajou University;Department of Physics, Ajou University;
초록

Amorphous $TiO_2$ thin films were deposited on silicon substrates by the RF magnetron sputtering under various conditions, and studied by the spectroscopic ellipsometry (SE). To determine the optical constants as a function of photon energy and

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