Aug, 31, 2024

Vol.57 No.4

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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 29(6); 1996
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 1996;29(6):683-690. Published online: Nov, 30, -0001

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MO-COMPOUNDS AS A DIFFUSION BARRIER BETWEEN Cu AND Si

  • Kim, Ji-Hyung;Lee, Yong-Hyuk;Kwon, Yong-Sung;Yeom, Geun-Young;Song, Jong-Han;
    Department of Materials Engineering, Sungkyunkwan University;Department of Physics, Sungkyunkwan University;Department of Physics, Sungkyunkwan University;Department of Materials Engineering, Sungkyunkwan University;Korea Institute of Science and Technolo
초록

In this study, the diffusion barrier properties of $1000 AA$ thick molybdenum compounds (Mo, Mo-N, $MoSi_2$, Mo-Si-N) were investigated using sheet resistance measurements, X-ray diffraction (XRD), X-ray photoelectron spectroscopy (X

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