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- KISE Journal of Korean Institute of Surface Engineering
- Volume 29(6); 1996
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 1996;29(6):851-856. Published online: Nov, 30, -0001
STRUCTURAL ANALYSIS OF COPPER PHTHALOCYANINE THIN FILMS FABRICATED BY PLASMA-ACTIVATED EVAPORATION
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Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology;Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology;Department of Physics, Korea Advanced Institute of Scie
초록
Copper Phthalocyanine (CuPc) thin films were fabricated on the silicon wafers by plasma activated evaporation method and structural analysis were carried out with various spectroscopies. The CuPc films had dense and smooth morphology and they also showed
키워드 copper phthalocyanine;plasma activated evaporation;structure;analysis;