Aug, 31, 2024

Vol.57 No.4

최신논문 논문목록
논문검색
논문 상세 검색
학회 연락처

상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 30(4); 1997
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 1997;30(4):255-261. Published online: Nov, 30, -0001

PDF

Li$_2$Po$_{4-x}$N$_{x}$ 박막의 이온전도도에 미치는 Ti 첨가

  • 이재혁;이유기;박종완;
    한양대학교 금속공학과;한양대학교 금속공학과;한양대학교 금속공학과;
초록

Thin film batteries can be used as a micro power source for electronic in which minute power is needed. In this study, lithium phosphorous oxynitride(LIPON) thin films were deposited as an eletrolyte for lithium ion batteries using RF magentron sputtering

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