Aug, 31, 2024

Vol.57 No.4

최신논문 논문목록
논문검색
논문 상세 검색
학회 연락처

상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 30(5); 1997
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 1997;30(5):298-309. Published online: Nov, 30, -0001

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펄스형 DC PACVD 법에의해 미치는 공정인자의 영향

  • 김진관;변응선;백운승;이구현;제창웅;윤재홍;이상로;
    현제 현대전자 반도체 2연규소 FAB실 근무;한국기계연구원;한국기계연구원;한국기계연구원;창원기능대학;창원대학교 재료공학과;한국기계연구원;
초록

Hard Tin coating on tool steel substrate were prepared using the pulsed PACVE. An orthogonal experimental design was employed to find the best deposition conditions for TiN coating and to systematically understand the effect of processing parameters. The

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