Aug, 31, 2024

Vol.57 No.4

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상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 31(6); 1998
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 1998;31(6):345-358. Published online: Nov, 30, -0001

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Si 및Si$_{0.7}$Ge$_{0.3}$ 박막의 표현형태 및 조도의 전개

  • 이내웅;
    성균관대학교,금속·재료공학과;
초록

The evolution of surface roughness and morphology in epitaxial Si and $Si_{0.7}Ge{0.3}$ alloys grown by UHV opm-beam sputter deposition onto nominally-singular, [100]-, and [110]-mi-scut Si(001) was investigated by stomic force microscopy and t

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