Aug, 31, 2024

Vol.57 No.4

학회 연락처

상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 32(2); 1999
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 1999;32(2):125-133. Published online: Nov, 30, -0001

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반응성 DC 마그네트론 스퍼터법에 의한 SnO$_2$ : F 박막의 전기광학적 특성

  • 정영호;김영진;신재혁;송국현;신성호;박정일;박광자;
    경기대학교 재료공학과;경기대학교 재료공학과;국립기술품질원;국립기술품질원;국립기술품질원;국립기술품질원;국립기술품질원;
초록

Fluorine-doped $SnO_2$ thin films were deposited on soda-lime glass substrates by reactive DC magnetron sputtering method. Crystallinity as well as electrical and optical properties of $SnO_2$ : F thin film were investigated as the v

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