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- KISE Journal of Korean Institute of Surface Engineering
- Volume 32(3); 1999
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 1999;32(3):303-306. Published online: Nov, 30, -0001
EFFECT OF SUBSTRATE BIAS ON THE DIAMOND GROWTH USING MICROWAVE PLASMA CVD
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Chiba Institute of Technology, Precision Engineering;Chiba Institute of Technology, Precision Engineering;
초록
On the effect of substrate bias at first stage of diamond synthesis at lower substrate temperature(approximately 673K) using microwave plasma CVD and effect of reaction gas system for the bias enhanced nucleation were studied. The reaction gas was mixture
키워드 Diamond;CVD;Bias;Nucleation;Reaction gas;