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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 32(3); 1999
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 1999;32(3):385-388. Published online: Nov, 30, -0001
Electron field emission from various CVD diamond films
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Graduate school, Chiba Institute of Technology;Chiba Institute of Technology;Chiba Institute of Technology;
초록
Electron field emission properties from various CVD diamond films were studied. Diamond films were synthesized by microwave plasma CVD at 1173K and at 673K substrates temperature and pulse microwave plasma CVD at 1173K. B-doped diamond film was synthesize
키워드 Diamond;NEA;CVD;Electric field emission;Pulse microwave;