Aug, 31, 2024

Vol.57 No.4

최신논문 논문목록
논문검색
논문 상세 검색
학회 연락처

상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 32(3); 1999
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 1999;32(3):410-415. Published online: Nov, 30, -0001

PDF

ADHESION STUDIES OF MAGNETRON-SPUTTERED COPPER FILMS ON INCONEL SUBSTRATES

  • Lee, G.H.;Kwon, S.C.;Lee, S.Y.;
    Surface Engineering Laboratory, KIMM;Surface Engineering Laboratory, KIMM;Assessment & Planning, STEPI;
초록

The adhesion strength of sputtered copper films to Inconel substrates has been studied using the scratch test. The effects of substrate treatments before deposition such as chemical or ion bombardment etching were investigated by means of a mean critical

키워드