Aug, 31, 2024

Vol.57 No.4

학회 연락처

상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 33(2); 2000
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 2000;33(2):87-92. Published online: Nov, 30, -0001

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SnO$_2$박막의 전기적 특성에 미치는 불소 doping및 열처리 효과

  • 류득배;이수완;박정일;박광자;
    선문대학교 재료공학과;선문대학교 재료공학과;기술표준원 무기화학과;기술표준원 무기화학과;
초록

Transparent and electrical conducting tin oxide thin films were fabricated on soda lime silicate glass by thermal chemical vapour deposition technique. Thin films were deposition from mixtures of tetramethyltin (TMT) as a precursor, oxygen or oxygen conta

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