Aug, 31, 2024

Vol.57 No.4

최신논문 논문목록
논문검색
논문 상세 검색
학회 연락처

상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 33(2); 2000
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 2000;33(2):115-125. Published online: Nov, 30, -0001

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Reactive Magnetron Sputter ion Plating법으로 증착된 TiN 박막의 특성에 관한 연구

  • 이민구;김흥회;김선재;이창규;김영석;
    한국원자력연구소;한국원자력연구소;한국원자력연구소;한국원자력연구소;한국원자력연구소;
초록

TiN films were deposited onto Stellite 6B alloy (Co base) by the reactive magnetron sputter ion plating. As the bias increases, TiN film changes from columnar structure to dense structure with great hardness and smooth surface due to densification and res

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