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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 33(5); 2000
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2000;33(5):349-355. Published online: Nov, 30, -0001
상온에서 분말타겟의 스퍼터에 의해 증착된 ITO박막
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두원공과대학 전자과;성균관대학교 전기공학과;기술표준원 무기화학과;기술표준원 무기화학과;기술표준원 무기화학과;
초록
Indium tin oxide (ITO) thin films have been deposited on PET (polyethylene terephthalate) and glass substrates by a do magnetron sputter method of powder target without heat treatments such as substrate heater and post heat treatment. During the sputterin
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