Aug, 31, 2024

Vol.57 No.4

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상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 34(2); 2001
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 2001;34(2):97-104. Published online: Nov, 30, -0001

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플라즈마 화학증착법에 의해 제조된 (Ti$_{1-x}$AI$_{x}$)N 박막의 미세조직 및 기계적 특성에 관한 연구

  • Lee, D.K.;Lee, S.H.;Y.H. Han;Lee, J.J.;
    School of Materials and Engineering, Seoul National University;School of Materials and Engineering, Seoul National University;School of Materials and Engineering, Seoul National University;School of Materials and Engineering, Seoul National University;
초록

($Ti_{ 1-x}$$Al_{ x}$)N has been deposited on high speed steel (HSS) substrate using PECVD from the gas mixture of $TiC1_4$, $AlC1_4$, $NH_3$, $H_2$, and Ar. The correlation between the mic

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