Aug, 31, 2024

Vol.57 No.4

최신논문 논문목록
논문검색
논문 상세 검색
학회 연락처

상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 34(3); 2001
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 2001;34(3):258-263. Published online: Nov, 30, -0001

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CF$_4$ 플라즈마 처리로 불소를 첨가한 실록산 Spin-On-Glass 박막의 특성

  • 김현중;김기호;
    충북대학교 재료공학과;충북대학교 재료공학과;
초록

Siloxane thin films were fabricated on a silicon wafer by spin-coating using a siloxane solution made by the sol-gel process. Fluorine was doped using$ CF_4$ plasma treatment. The film was then annealed in-situ state in the nitrogen atmosphere.

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