Aug, 31, 2024

Vol.57 No.4

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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 34(5); 2001
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 2001;34(5):391-394. Published online: Nov, 30, -0001

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The atmospheric plasma reactor with water wall to decompose CF4

  • Itatani, Ryohei;Deguchi, Mikio;Toda, Toshihiko;Ban, Heitaro;
    Niihama National College of Technology;Niihama National College of Technology;Youth Engineering Co., LTD.;;
초록

A new type plasma reactor is proposed to decompose CF4 diluted with N2 gas in atmospheric pressure. The arc plasmas is surrounded with a waterwall which acts as a source of water vapor, the solvent of HF, resultant product after decomposition, and conveye

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