Aug, 31, 2024

Vol.57 No.4

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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 34(5); 2001
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 2001;34(5):409-413. Published online: Nov, 30, -0001

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High rate magnetron sputtering of thick Cr-based tribological coatings

  • Bin, Jin H.;Nam, Kyung H.;Boo, Jin H.;Han, Jeon G.;
    Center for Advanced Plasma Surface Technology, SungKyunKwan University;Center for Advanced Plasma Surface Technology, SungKyunKwan University;Center for Advanced Plasma Surface Technology, SungKyunKwan University;Center for Advanced Plasma Surface Technol
초록

In this study, high rate deposition of thick CrNx films was carried out by crossed field unbalanced magnetron sputtering for the special application such as piston ring employed in automobile engine. For the high rate deposition and thick CrNx films forma

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