Aug, 31, 2024

Vol.57 No.4

최신논문 논문목록
논문검색
논문 상세 검색
학회 연락처

상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 34(5); 2001
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 2001;34(5):414-420. Published online: Nov, 30, -0001

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Hard TiN Coating by Magnetron-ICP P $I^3$D

  • S.A. Nikiforov;Kim, G.H.;G.H. Rim;K.W. Urm;Lee, S.H.;
    Korea Electrotechnology Research Institute (KERI);Korea Electrotechnology Research Institute (KERI);Korea Electrotechnology Research Institute (KERI);Doosan Heavy Industries & Construction Co.;Doosan Heavy Industries & Construction Co.;
초록

A 30-kV plasma immersion ion implantation setup (P $I^3$) has been equipped with a self-developed 6`-magnetron to perform hard coatings with enhanced adhesion by P $I^3$D(P $I^3$ assisted deposition) process. Using ICP sou

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