Aug, 31, 2024

Vol.57 No.4

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상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 34(5); 2001
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 2001;34(5):421-428. Published online: Nov, 30, -0001

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Synthesis of WC-CrN superlattice film by cathodic arc ion plating system

  • Lee, Ho.Y.;Jeon.G. Han;Se.H. Yang;
    Center for Advanced Plasma Surface Technology SungKyunKwan University;Center for Advanced Plasma Surface Technology SungKyunKwan University;;
초록

New WC-CrN superlattice film was deposited on Si substrate (500$mu extrm{m}$) using cathodic arc ion plating system. The microstructure and mechanical properties of the film depend on the superlattice period (λ). In the X-ray diffraction analys

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