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KISE Journal of Korean Institute of Surface Engineering 2001;34(5):429-434. Published online: Nov, 30, -0001
Ti-Cu-N nanocomposite films deposited by arc ion plating and magnetron sputter hybrid system with various copper contents. The microstructure and mechanical properties of Ti-Cu-N superhard nanocomposite films depend on the Cu concentration. In X-ray diffr
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