Aug, 31, 2024

Vol.57 No.4

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상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 34(5); 2001
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 2001;34(5):455-464. Published online: Nov, 30, -0001

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Role of Energy and Composition of Film-Forming Species in Formation of Composition and Structure of Compound Films

  • Shaginyan, L.R.;
    Institute for Materials Science Problems of National Academy of Sciences of Ukraine;
초록

Effect of bombardment of the growing film by energetic particles on its properties is know over many years and is widely used for modification of the film properties. Despite of this there are no final answers on such questions as: what is the mechanism o

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