Aug, 31, 2024

Vol.57 No.4

최신논문 논문목록
논문검색
논문 상세 검색
학회 연락처

상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 35(2); 2002
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 2002;35(2):107-112. Published online: Nov, 30, -0001

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이온빔 스퍼터링 방법으로 증착한 NiFe/Ag 박막의 확산 거동

  • 지재범;이성래;문대원;
    고려대학교 재료공학부;고려대학교 재료공학부;한국표준과학연구원;
초록

We have studied diffusion behavior of NiFe/Ag bilayer deposited by on silicon Ion Beam Sputtering methods. The diffusion behavior of NiFe and Ag in NiFe/Ag thin film is analyzed by Medium Energy Ion Scattering Spectroscopy. For samples without Ta underlay

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