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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 35(2); 2002
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2002;35(2):122-128. Published online: Nov, 30, -0001
PECVD법에 의한 DLC 박막의 증착
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한국기술교육대학교 신소재공학과;경기대학교 재료공학과;
초록
This study was conducted to synthesize the diamond like carbon films by plasma enhanced chemical vapor deposition (PECVD). The effects of gas composition on growth and mechanical properties of the films were investigated. A little amount of hydrogen or ox
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