Aug, 31, 2024

Vol.57 No.4

학회 연락처

상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 35(3); 2002
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 2002;35(3):121-126. Published online: Nov, 30, -0001

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WC/C 다층박막의 합성 및 기계적 특성에 관한 연구

  • 명현식;한전건;
    성균관대학교 금속재료공학부 플라즈마 응용 표면기술 연구센터;성균관대학교 금속재료공학부 플라즈마 응용 표면기술 연구센터;
초록

WC/C multilayered films were deposited by arc ion plating and magnetron sputter hybrid system with various $C_2$H$_2$ flow rates and bias voltages. The coatings have been characterized with respect to their chemical composition (Glow

키워드 WC/C;arc-magnetron hybrid coating;lubrication coating;