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KISE Journal of Korean Institute of Surface Engineering 2002;35(3):133-140. Published online: Nov, 30, -0001
The Ti-Si-N coating layers were synthesized on SKD 11 steel substrate by a DC reactive magnetron co-sputtering technique with separate Ti and Si targets. The high resolution transmission electron microscopy (HRTEM) and X-ray photoelectron spectroscopy (XP
키워드 Ti-Si-N;Nanocomposite;Hardness;Wear;