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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 35(6); 2002
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2002;35(6):377-382. Published online: Nov, 30, -0001
코발트살리사이드를 위한 습식세정 공정
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서울시립대학교 신소재공학과;서울시립대학교 신소재공학과;
초록
We investigated the appropriate wet cleaning process for Co-Ti-Si compounds formed on top of cobalt disilicide made from Co/Ti deposition and two rapid thermal annealing (RTA). We employed three wet cleaning processes, WP1 (
키워드
Cobalt Salicide;wet cleaning;CoTiSi compound;Co/Ti silicide;BOE;