Aug, 31, 2024

Vol.57 No.4

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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 36(1); 2003
  • Article

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KISE Journal of Korean Institute of Surface Engineering 2003;36(1):74-78. Published online: Nov, 30, -0001

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Corrosion Protection of Plasma-Polymerized Cyclohexane Films Deposited on Copper

  • Park, Z.T.;Lee, J.H.;Choi, Y.S.;Ahn, S.H.;Kim, J.G.;Cho, S.H.;Boo, J.H.;
    Center for Advanced Plasma Surface Technology, Sung Kyun Kwan University;Center for Advanced Plasma Surface Technology, Sung Kyun Kwan University;Center for Advanced Plasma Surface Technology, Sung Kyun Kwan University;Center for Advanced Plasma Surface T
초록

The corrosion failure of electronic devices has been a major reliability concern lately. This failure is an ongoing concern because of miniaturization of integrated circuits (IC) and the increased use of polymers in electronic packaging. Recently, plasma-

키워드 Corrosion;Plasma enhanced chemical vapor deposition(PECVD);Cyclohexane film;