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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 36(2); 2003
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2003;36(2):109-115. Published online: Nov, 30, -0001
하이브리드 증착 시스템에 의해 합성된 나노복합체 Ti-Al-Si-N 박막의 미세구조와 기계적 특성
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부산대학교 재료공학부;부산대학교 재료공학부;부산대학교 재료공학부;
초록
Quaternary Ti-Al-Si-N films were deposited on WC-Co substrates by a hybrid deposition system of arc ion plating (AIP) method for Ti-Al source and DC magnetron sputtering technique for Si incorporation. The synthesized Ti-Al-Si-N films were revealed to be
키워드 Ti-Al-Si-N;Superhardess;Nanocomposite;Hybrid deposition system;