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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 36(2); 2003
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2003;36(2):122-127. Published online: Nov, 30, -0001
하이브리드 증착 시스템을 이용한 나노복합체 Ti-Si-N 박막의 특성 연구
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부산대학교 공과대학 재료공학부;부산대학교 공과대학 재료공학부;기술신용보증기금 기술평가센터;부산대학교 공과대학 재료공학부;
초록
Ti - Si - N hard films were deposited on SKD11 steel substrates by a hybrid deposition system, where TiN was deposited by AIP method while Si was incorporated by sputtering one. The microstructure of Ti-Si-N films was revealed to be a composite of TiN cry
키워드 Ti-Si-N;Hybrid deposition system;Superhardness;